Investigating the Efficacy of Hafnium Dioxide Barrier Layers to Halt Copper Oxide Formation in Redistribution Layers for Three-Dimensional (3D) Packaging.

Details

Language :

English

ISSN :

19487185

Volume :

13

Issue :

34

Database :

Supplemental Index

Journal :

Journal of Physical Chemistry Letters

Publication Type :

Academic Journal

Accession number :

158882087

Full Text :

https://doi.org/10.1021/acs.jpclett.2c02080