Investigating the Efficacy of Hafnium Dioxide Barrier Layers to Halt Copper Oxide Formation in Redistribution Layers for Three-Dimensional (3D) Packaging.

MLA

Brady-Boyd, Anita, et al. “Investigating the Efficacy of Hafnium Dioxide Barrier Layers to Halt Copper Oxide Formation in Redistribution Layers for Three-Dimensional (3D) Packaging.” Journal of Physical Chemistry Letters, vol. 13, no. 34, Sept. 2022, pp. 8130–33. EBSCOhost, https://doi.org/10.1021/acs.jpclett.2c02080.

APA

Brady-Boyd, A., Chery, E., & Armini, S. (2022). Investigating the Efficacy of Hafnium Dioxide Barrier Layers to Halt Copper Oxide Formation in Redistribution Layers for Three-Dimensional (3D) Packaging. Journal of Physical Chemistry Letters, 13(34), 8130–8133. https://doi.org/10.1021/acs.jpclett.2c02080

Chicago

Brady-Boyd, Anita, Emmanuel Chery, and Silvia Armini. 2022. “Investigating the Efficacy of Hafnium Dioxide Barrier Layers to Halt Copper Oxide Formation in Redistribution Layers for Three-Dimensional (3D) Packaging.” Journal of Physical Chemistry Letters 13 (34): 8130–33. doi:10.1021/acs.jpclett.2c02080.