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Deep reactive ion etching: a promising technology for micro- and nanosatellites.
- Source :
- Smart Materials & Structures; Dec2001, Vol. 10 Issue 6, p1-1, 1p
- Publication Year :
- 2001
Details
- Language :
- English
- ISSN :
- 09641726
- Volume :
- 10
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- Smart Materials & Structures
- Publication Type :
- Academic Journal
- Accession number :
- 98262635
- Full Text :
- https://doi.org/10.1088/0964-1726/10/6/302