Si Micro Probe and SiO2 Micro Tube Array Integrated with nMOSFETs.

Authors :: Takei, K.
Kawashima, T.
Takao, H.
Sawada, K.
Ishida, M.
Source :: TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators & Microsystems Conference; 2007, p1381-1384, 4p
Publication Year :: 2007

Language :: English
ISBNs :: 9781424408429
Database :: Complementary Index
Journal :: TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators & Microsystems Conference
Publication Type :: Conference
Accession number :: 81298950
Full Text :: https://doi.org/10.1109/SENSOR.2007.4300400