Si Micro Probe and SiO2 Micro Tube Array Integrated with nMOSFETs.

MLA

Takei, K., et al. “Si Micro Probe and SiO2 Micro Tube Array Integrated with NMOSFETs.” TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators & Microsystems Conference, Jan. 2007, pp. 1381–84. EBSCOhost, https://doi.org/10.1109/SENSOR.2007.4300400.

APA

Takei, K., Kawashima, T., Takao, H., Sawada, K., & Ishida, M. (2007). Si Micro Probe and SiO2 Micro Tube Array Integrated with nMOSFETs. TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators & Microsystems Conference, 1381–1384. https://doi.org/10.1109/SENSOR.2007.4300400

Chicago

Takei, K., T. Kawashima, H. Takao, K. Sawada, and M. Ishida. 2007. “Si Micro Probe and SiO2 Micro Tube Array Integrated with NMOSFETs.” TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators & Microsystems Conference, January, 1381–84. doi:10.1109/SENSOR.2007.4300400.