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Successively dry-wet etched InP microlens for bell shaped LED.

Authors :
Jaeho Kim
Kyoung Min Kim
Soo-Kun Jeon
Moonjung Kim
Eun-Hyun Park
Young-Se Kwon
Source :
International Conference on Indium Phosphide & Related Materials, 2003; 2003, p175-177, 3p
Publication Year :
2003

Details

Language :
English
ISBNs :
9780780377042
Database :
Complementary Index
Journal :
International Conference on Indium Phosphide & Related Materials, 2003
Publication Type :
Conference
Accession number :
81181989
Full Text :
https://doi.org/10.1109/ICIPRM.2003.1205342