Successively dry-wet etched InP microlens for bell shaped LED.

MLA

Jaeho Kim, et al. “Successively Dry-Wet Etched InP Microlens for Bell Shaped LED.” International Conference on Indium Phosphide & Related Materials, 2003, Jan. 2003, pp. 175–77. EBSCOhost, https://doi.org/10.1109/ICIPRM.2003.1205342.

APA

Jaeho Kim, Kyoung Min Kim, Soo-Kun Jeon, Moonjung Kim, Eun-Hyun Park, & Young-Se Kwon. (2003). Successively dry-wet etched InP microlens for bell shaped LED. International Conference on Indium Phosphide & Related Materials, 2003, 175–177. https://doi.org/10.1109/ICIPRM.2003.1205342

Chicago

Jaeho Kim, Kyoung Min Kim, Soo-Kun Jeon, Moonjung Kim, Eun-Hyun Park, and Young-Se Kwon. 2003. “Successively Dry-Wet Etched InP Microlens for Bell Shaped LED.” International Conference on Indium Phosphide & Related Materials, 2003, January, 175–77. doi:10.1109/ICIPRM.2003.1205342.