Fast wafer level monitoring of stress induced leakage current in deep sub-micron embedded non-volatile memory processes.

Details

Language :

English

ISBNs :

9780780375581

Database :

Complementary Index

Journal :

IEEE International Integrated Reliability Workshop Final Report, 2002

Publication Type :

Conference

Accession number :

81162286

Full Text :

https://doi.org/10.1109/IRWS.2002.1194237