Evaluation of an advanced wafer carrier for ILD planarization.

Authors :: Jaso, M.
Glynn, T.
Giunta, J.
Diefenderfer, D.
Source :: 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference & Workshop. ASMC 2000 (Cat. No.00CH37072); 2000, p419-421, 3p
Publication Year :: 2000

Language :: English
ISBNs :: 9780780359215
Database :: Complementary Index
Journal :: 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference & Workshop. ASMC 2000 (Cat. No.00CH37072)
Publication Type :: Conference
Accession number :: 80766887
Full Text :: https://doi.org/10.1109/ASMC.2000.902621