Evaluation of an advanced wafer carrier for ILD planarization.

MLA

Jaso, M., et al. “Evaluation of an Advanced Wafer Carrier for ILD Planarization.” 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference & Workshop. ASMC 2000 (Cat. No.00CH37072), Jan. 2000, pp. 419–21. EBSCOhost, https://doi.org/10.1109/ASMC.2000.902621.

APA

Jaso, M., Glynn, T., Giunta, J., & Diefenderfer, D. (2000). Evaluation of an advanced wafer carrier for ILD planarization. 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference & Workshop. ASMC 2000 (Cat. No.00CH37072), 419–421. https://doi.org/10.1109/ASMC.2000.902621

Chicago

Jaso, M., T. Glynn, J. Giunta, and D. Diefenderfer. 2000. “Evaluation of an Advanced Wafer Carrier for ILD Planarization.” 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference & Workshop. ASMC 2000 (Cat. No.00CH37072), January, 419–21. doi:10.1109/ASMC.2000.902621.