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The role of surface in sputtered amorphous silicon: An oxidation study.
- Source :
- Journal of Applied Physics; 12/1/1985, Vol. 58 Issue 11, p4251, 5p, 2 Graphs
- Publication Year :
- 1985
-
Abstract
- Presents a study which investigated the role of surface in sputtered amorphous silicon. Method of the study; Results and discussion; Conclusion.
- Subjects :
- GEOMETRIC surfaces
SPUTTERING (Physics)
AMORPHOUS substances
SILICON
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 58
- Issue :
- 11
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7643050
- Full Text :
- https://doi.org/10.1063/1.335560