The role of surface in sputtered amorphous silicon: An oxidation study.

MLA

Cutrera, M., et al. “The Role of Surface in Sputtered Amorphous Silicon: An Oxidation Study.” Journal of Applied Physics, vol. 58, no. 11, Dec. 1985, p. 4251. EBSCOhost, https://doi.org/10.1063/1.335560.

APA

Cutrera, M., Gennaro, A. M., Battioni, M., Koropecki, R. R., De Bernárdez, L. S., Arce, R., & Buitrago, R. (1985). The role of surface in sputtered amorphous silicon: An oxidation study. Journal of Applied Physics, 58(11), 4251. https://doi.org/10.1063/1.335560

Chicago

Cutrera, M., A. M. Gennaro, M. Battioni, R. R. Koropecki, L. S. De Bernárdez, R. Arce, and R. Buitrago. 1985. “The Role of Surface in Sputtered Amorphous Silicon: An Oxidation Study.” Journal of Applied Physics 58 (11): 4251. doi:10.1063/1.335560.