Comprehensive model of electron energy deposition.

Authors :: Han, Geng
Khan, Mumit
Fang, Yanghua
Cerrina, Franco
Source :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2002, Vol. 20 Issue 6, p2666-2671, 6p
Publication Year :: 2002

Language :: English
ISSN :: 10711023
Volume :: 20
Issue :: 6
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :: Academic Journal
Accession number :: 74345783
Full Text :: https://doi.org/10.1116/1.1526633