Comprehensive model of electron energy deposition.

MLA

Han, Geng, et al. “Comprehensive Model of Electron Energy Deposition.” Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, vol. 20, no. 6, Nov. 2002, pp. 2666–71. EBSCOhost, https://doi.org/10.1116/1.1526633.

APA

Han, G., Khan, M., Fang, Y., & Cerrina, F. (2002). Comprehensive model of electron energy deposition. Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, 20(6), 2666–2671. https://doi.org/10.1116/1.1526633

Chicago

Han, Geng, Mumit Khan, Yanghua Fang, and Franco Cerrina. 2002. “Comprehensive Model of Electron Energy Deposition.” Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures 20 (6): 2666–71. doi:10.1116/1.1526633.