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Electrical characteristics of polycrystalline silicon thin film transistors using the Cu-field aided lateral crystallization process.
- Source :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2002, Vol. 20 Issue 4, p1427-1430, 4p
- Publication Year :
- 2002
Details
- Language :
- English
- ISSN :
- 10711023
- Volume :
- 20
- Issue :
- 4
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
- Publication Type :
- Academic Journal
- Accession number :
- 74345604
- Full Text :
- https://doi.org/10.1116/1.1491552