Role of atomic hydrogen in argon plasma-assisted epitaxy of InGaAsP/InP.

Authors :: LaPierre, R. R.
Robinson, B. J.
Thompson, D. A.
Source :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1997, Vol. 15 Issue 5, p1707-1714, 8p
Publication Year :: 1997

Language :: English
ISSN :: 10711023
Volume :: 15
Issue :: 5
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :: Academic Journal
Accession number :: 74342508
Full Text :: https://doi.org/10.1116/1.589359