Role of atomic hydrogen in argon plasma-assisted epitaxy of InGaAsP/InP.

MLA

LaPierre, R. R., et al. “Role of Atomic Hydrogen in Argon Plasma-Assisted Epitaxy of InGaAsP/InP.” Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, vol. 15, no. 5, Sept. 1997, pp. 1707–14. EBSCOhost, https://doi.org/10.1116/1.589359.

APA

LaPierre, R. R., Robinson, B. J., & Thompson, D. A. (1997). Role of atomic hydrogen in argon plasma-assisted epitaxy of InGaAsP/InP. Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, 15(5), 1707–1714. https://doi.org/10.1116/1.589359

Chicago

LaPierre, R. R., B. J. Robinson, and D. A. Thompson. 1997. “Role of Atomic Hydrogen in Argon Plasma-Assisted Epitaxy of InGaAsP/InP.” Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures 15 (5): 1707–14. doi:10.1116/1.589359.