Helium permeation through a-C:H films deposited on polymeric substrates.

Authors :: Valentini, L.
Bellachioma, M. C.
Lozzi, L.
Santucci, S.
Kenny, J. M.
Source :: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2002, Vol. 20 Issue 5, p1647-1652, 6p
Publication Year :: 2002

Language :: English
ISSN :: 07342101
Volume :: 20
Issue :: 5
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
Publication Type :: Academic Journal
Accession number :: 74337022
Full Text :: https://doi.org/10.1116/1.1497177