Helium permeation through a-C:H films deposited on polymeric substrates.

MLA

Valentini, L., et al. “Helium Permeation through A-C:H Films Deposited on Polymeric Substrates.” Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, vol. 20, no. 5, Sept. 2002, pp. 1647–52. EBSCOhost, https://doi.org/10.1116/1.1497177.

APA

Valentini, L., Bellachioma, M. C., Lozzi, L., Santucci, S., & Kenny, J. M. (2002). Helium permeation through a-C:H films deposited on polymeric substrates. Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, 20(5), 1647–1652. https://doi.org/10.1116/1.1497177

Chicago

Valentini, L., M. C. Bellachioma, L. Lozzi, S. Santucci, and J. M. Kenny. 2002. “Helium Permeation through A-C:H Films Deposited on Polymeric Substrates.” Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films 20 (5): 1647–52. doi:10.1116/1.1497177.