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ChemInform Abstract: Low Temperature Deposition of AlN Films by an Alternate Supply of Trimethyl Aluminum and Ammonia.
- Source :
- ChemInform; Jan1997, Vol. 28 Issue 5, pno-no, 1p
- Publication Year :
- 1997
Details
- Language :
- English
- ISSN :
- 09317597
- Volume :
- 28
- Issue :
- 5
- Database :
- Complementary Index
- Journal :
- ChemInform
- Publication Type :
- Academic Journal
- Accession number :
- 64610135
- Full Text :
- https://doi.org/10.1002/chin.199705026