ChemInform Abstract: Low Temperature Deposition of AlN Films by an Alternate Supply of Trimethyl Aluminum and Ammonia.

MLA

Riihelae, D., et al. “ChemInform Abstract: Low Temperature Deposition of AlN Films by an Alternate Supply of Trimethyl Aluminum and Ammonia.” ChemInform, vol. 28, no. 5, Jan. 1997, p. no. EBSCOhost, https://doi.org/10.1002/chin.199705026.

APA

Riihelae, D., Ritala, M., Matero, R., Leskelae, M., Jokinen, J., & Haussalo, P. (1997). ChemInform Abstract: Low Temperature Deposition of AlN Films by an Alternate Supply of Trimethyl Aluminum and Ammonia. ChemInform, 28(5), no. https://doi.org/10.1002/chin.199705026

Chicago

Riihelae, D., M. Ritala, R. Matero, M. Leskelae, J. Jokinen, and P. Haussalo. 1997. “ChemInform Abstract: Low Temperature Deposition of AlN Films by an Alternate Supply of Trimethyl Aluminum and Ammonia.” ChemInform 28 (5): no. doi:10.1002/chin.199705026.