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Attainment of low interfacial trap density absent of a large midgap peak in In0.2Ga0.8As by Ga2O3(Gd2O3) passivation.

Authors :
Lin, C. A.
Chiu, H. C.
Chiang, T. H.
Lin, T. D.
Chang, Y. H.
Chang, W. H.
Chang, Y. C.
Wang, W.-E.
Dekoster, J.
Hoffmann, T. Y.
Hong, M.
Kow, J.
Source :
Applied Physics Letters; 2/7/2011, Vol. 98 Issue 6, p062108, 3p
Publication Year :
2011

Abstract

The pronounced high interfacial densities of states (D<subscript>it</subscript>) commonly observed around the midgap energy of dielectric/GaAs interfaces are generally considered the culprit responsible for the poor electrical performance of the corresponding inversion-channel metal-oxide-semiconductor field-effect-transistors. In this work, comprehensive D<subscript>it</subscript> spectra as the function of energy [D<subscript>it</subscript>(E)] inside the In<subscript>0.2</subscript>Ga<subscript>0.8</subscript>As band gap were constructed by using the quasistatic capacitance-voltage and the temperature-dependent conductance method on n- and p-type ultrahigh vacuum (UHV)-Ga<subscript>2</subscript>O<subscript>3</subscript>(Gd<subscript>2</subscript>O<subscript>3</subscript>)/In<subscript>0.2</subscript>Ga<subscript>0.8</subscript>As and atomic-layer-deposited (ALD)-Al<subscript>2</subscript>O<subscript>3</subscript>/In<subscript>0.2</subscript>Ga<subscript>0.8</subscript>As metal-oxide-semiconductor capacitors. Unlike the ALD-Al<subscript>2</subscript>O<subscript>3</subscript>/In<subscript>0.2</subscript>Ga<subscript>0.8</subscript>As interface giving a D<subscript>it</subscript> spectrum with a high midgap D<subscript>it</subscript> peak, the UHV-Ga<subscript>2</subscript>O<subscript>3</subscript>(Gd<subscript>2</subscript>O<subscript>3</subscript>)/In<subscript>0.2</subscript>Ga<subscript>0.8</subscript>As interface shows a D<subscript>it</subscript> spectrum that monotonically decreases from the valence band to the conduction band with no discernible midgap peak. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
00036951
Volume :
98
Issue :
6
Database :
Complementary Index
Journal :
Applied Physics Letters
Publication Type :
Academic Journal
Accession number :
58044745
Full Text :
https://doi.org/10.1063/1.3554375