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Eco-Friendly Fully Water-Driven HfGdOx Gate Dielectrics and Its Application in Thin-Film Transistors and Logic Circuits.
- Source :
- IEEE Transactions on Electron Devices; Mar2020, Vol. 67 Issue 3, p1001-1008, 8p
- Publication Year :
- 2020
-
Abstract
- In this work, HfGdO<subscript>x</subscript> gate dielectric thin films have been prepared via a nontoxic and environmental-friendly fully water-driven (WD) method. An in-depth investigation has been conducted to reveal the evolution of physical properties in the as-prepared HfGdO<subscript>x</subscript> thin films as a function of annealing temperature. Based on the measurements of electrical parameters of the HfGdO<subscript>x</subscript> thin films, it is observed that the 500 °C-annealed HfGdO<subscript>x</subscript> thin films have shown optimized properties, including a smooth surface, lower leakage current density, and a larger areal capacitance. To validate the feasibility of the HfGdO<subscript>x</subscript> gate dielectrics in thin-film transistors (TFTs), In<subscript>2</subscript>O<subscript>3</subscript>/HfGdO<subscript>x</subscript> TFTs have been constructed. The optimized In<subscript>2</subscript>O<subscript>3</subscript>/HfGdO<subscript>x</subscript> TFT exhibited excellent electrical performances, including high field-effect mobility of 11.2 cm<superscript>2</superscript> V<superscript>−1</superscript> s<superscript>−1</superscript>, a high ON-/OFF-state current ratio of 4.1 × 10<superscript>6</superscript>, a small sub-threshold swing of 105.2 mV/decade, and a threshold voltage shift of 0.58 V after 7200-s bias stress, respectively. Finally, based on the In<subscript>2</subscript>O<subscript>3</subscript>/HfGdO<subscript>x</subscript> TFT, an inverter is assembled by connecting an external 3-MΩ resistor. High gain of 8.73 and excellent swing characteristics have been obtained. As a result, it can be inferred that fully WD In<subscript>2</subscript>O<subscript>3</subscript>/HfGdO<subscript>x</subscript> TFTs with high performance will pave the way for achieving low-power-consumption, low-cost, and large-area electronics. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00189383
- Volume :
- 67
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- IEEE Transactions on Electron Devices
- Publication Type :
- Academic Journal
- Accession number :
- 143315725
- Full Text :
- https://doi.org/10.1109/TED.2019.2963224