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An electric measuring equipment integrated with an automatic optical registration and a chamber-based gas supply system for wafer-based gas sensors.
- Source :
- Proceedings of SPIE; 12/16/2019, Vol. 11287, p112871E-112871E-6, 1p
- Publication Year :
- 2019
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11287
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 142359653
- Full Text :
- https://doi.org/10.1117/12.2545503