An electric measuring equipment integrated with an automatic optical registration and a chamber-based gas supply system for wafer-based gas sensors.

MLA

Soskind, Yakov, et al. “An Electric Measuring Equipment Integrated with an Automatic Optical Registration and a Chamber-Based Gas Supply System for Wafer-Based Gas Sensors.” Proceedings of SPIE, vol. 11287, Dec. 2019, p. 112871E–112871E–6. EBSCOhost, https://doi.org/10.1117/12.2545503.

APA

Soskind, Y., Busse, L. E., Chen, M.-F., Lin, Y.-H., Chen, C.-W., Chen, P.-J., Lin, Y.-H., Cho, W.-H., & Chen, J.-L. (2019). An electric measuring equipment integrated with an automatic optical registration and a chamber-based gas supply system for wafer-based gas sensors. Proceedings of SPIE, 11287, 112871E–112871E–6. https://doi.org/10.1117/12.2545503

Chicago

Soskind, Yakov, Lynda E. Busse, Ming-Fu Chen, Yi-Hao Lin, Chih-Wen Chen, Po-Jui Chen, Yu-Hsin Lin, Wen-Hao Cho, and Jian-Lin Chen. 2019. “An Electric Measuring Equipment Integrated with an Automatic Optical Registration and a Chamber-Based Gas Supply System for Wafer-Based Gas Sensors.” Proceedings of SPIE 11287 (December): 112871E–112871E–6. doi:10.1117/12.2545503.