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Deciphering intermodulation in AlN laterally vibrating resonators.
- Source :
- 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS); 1/1/2016, p671-674, 4p
- Publication Year :
- 2016
Details
- Language :
- English
- ISBNs :
- 9781509019731
- Database :
- Complementary Index
- Journal :
- 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
- Publication Type :
- Conference
- Accession number :
- 114300050
- Full Text :
- https://doi.org/10.1109/MEMSYS.2016.7421715