Cite
Deciphering intermodulation in AlN laterally vibrating resonators.
MLA
Lu, Ruochen, et al. “Deciphering Intermodulation in AlN Laterally Vibrating Resonators.” 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Jan. 2016, pp. 671–74. EBSCOhost, https://doi.org/10.1109/MEMSYS.2016.7421715.
APA
Lu, R., Gao, A., & Gong, S. (2016). Deciphering intermodulation in AlN laterally vibrating resonators. 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), 671–674. https://doi.org/10.1109/MEMSYS.2016.7421715
Chicago
Lu, Ruochen, Anming Gao, and Songbin Gong. 2016. “Deciphering Intermodulation in AlN Laterally Vibrating Resonators.” 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), January, 671–74. doi:10.1109/MEMSYS.2016.7421715.