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A framework for standard modular simulation in semiconductor wafer fabrication systems.
- Source :
- Proceedings of the 37th Conference Winter Simulation; 12/4/2005, p2162-2171, 10p
- Publication Year :
- 2005
Details
- Language :
- English
- Database :
- Complementary Index
- Journal :
- Proceedings of the 37th Conference Winter Simulation
- Publication Type :
- Conference
- Accession number :
- 101539414