A framework for standard modular simulation in semiconductor wafer fabrication systems.

MLA

Ramírez-Hernández, José A., et al. “A Framework for Standard Modular Simulation in Semiconductor Wafer Fabrication Systems.” Proceedings of the 37th Conference Winter Simulation, Dec. 2005, pp. 2162–71. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edb&AN=101539414&authtype=sso&custid=ns315887.

APA

Ramírez-Hernández, J. A., Li, H., Fernandez, E., McLean, C., & Leong, S. (2005). A framework for standard modular simulation in semiconductor wafer fabrication systems. Proceedings of the 37th Conference Winter Simulation, 2162–2171.

Chicago

Ramírez-Hernández, José A., Heshan Li, Emmanuel Fernandez, Charles McLean, and Swee Leong. 2005. “A Framework for Standard Modular Simulation in Semiconductor Wafer Fabrication Systems.” Proceedings of the 37th Conference Winter Simulation, December, 2162–71. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edb&AN=101539414&authtype=sso&custid=ns315887.