CMOS compatible fabrication of flexible and semi-transparent FeRAM on ultra-thin bulk monocrystalline silicon (100) fabric.

Details

Language :

English

ISBNs :

9781479956227

Database :

Complementary Index

Journal :

14th IEEE International Conference on Nanotechnology

Publication Type :

Conference

Accession number :

101237867

Full Text :

https://doi.org/10.1109/NANO.2014.6967961