CMOS compatible fabrication of flexible and semi-transparent FeRAM on ultra-thin bulk monocrystalline silicon (100) fabric.

MLA

Ghoneim, Mohamed T., et al. “CMOS Compatible Fabrication of Flexible and Semi-Transparent FeRAM on Ultra-Thin Bulk Monocrystalline Silicon (100) Fabric.” 14th IEEE International Conference on Nanotechnology, Jan. 2014, pp. 448–51. EBSCOhost, https://doi.org/10.1109/NANO.2014.6967961.

APA

Ghoneim, M. T., Hanna, A. N., & Hussain, M. M. (2014). CMOS compatible fabrication of flexible and semi-transparent FeRAM on ultra-thin bulk monocrystalline silicon (100) fabric. 14th IEEE International Conference on Nanotechnology, 448–451. https://doi.org/10.1109/NANO.2014.6967961

Chicago

Ghoneim, Mohamed T., Amir N. Hanna, and Muhammad M. Hussain. 2014. “CMOS Compatible Fabrication of Flexible and Semi-Transparent FeRAM on Ultra-Thin Bulk Monocrystalline Silicon (100) Fabric.” 14th IEEE International Conference on Nanotechnology, January, 448–51. doi:10.1109/NANO.2014.6967961.