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Surface Chemistry in the Chemical Vapor Deposition of Electronic Materials.
- Source :
-
Chemical reviews [Chem Rev] 1996 Jun 20; Vol. 96 (4), pp. 1519-1532. - Publication Year :
- 1996
Details
- Language :
- English
- ISSN :
- 1520-6890
- Volume :
- 96
- Issue :
- 4
- Database :
- MEDLINE
- Journal :
- Chemical reviews
- Publication Type :
- Academic Journal
- Accession number :
- 11848801
- Full Text :
- https://doi.org/10.1021/cr950233m