Surface Chemistry in the Chemical Vapor Deposition of Electronic Materials.

MLA

Gates, Stephen M. “Surface Chemistry in the Chemical Vapor Deposition of Electronic Materials.” Chemical Reviews, vol. 96, no. 4, June 1996, pp. 1519–32. EBSCOhost, https://doi.org/10.1021/cr950233m.

APA

Gates, S. M. (1996). Surface Chemistry in the Chemical Vapor Deposition of Electronic Materials. Chemical Reviews, 96(4), 1519–1532. https://doi.org/10.1021/cr950233m

Chicago

Gates, Stephen M. 1996. “Surface Chemistry in the Chemical Vapor Deposition of Electronic Materials.” Chemical Reviews 96 (4): 1519–32. doi:10.1021/cr950233m.