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Atomic and molecular layer deposition for surface modification.

Authors :
Vähä-Nissi, Mika
Sievänen, Jenni
Salo, Erkki
Heikkilä, Pirjo
Kenttä, Eija
Johansson, Leena-Sisko
Koskinen, Jorma T.
Harlin, Ali
Source :
Journal of Solid State Chemistry. Jun2014, Vol. 214, p7-11. 5p.
Publication Year :
2014

Abstract

Abstract: Atomic and molecular layer deposition (ALD and MLD, respectively) techniques are based on repeated cycles of gas–solid surface reactions. A partial monolayer of atoms or molecules is deposited to the surface during a single deposition cycle, enabling tailored film composition in principle down to molecular resolution on ideal surfaces. Typically ALD/MLD has been used for applications where uniform and pinhole free thin film is a necessity even on 3D surfaces. However, thin – even non-uniform – atomic and molecular deposited layers can also be used to tailor the surface characteristics of different non-ideal substrates. For example, print quality of inkjet printing on polymer films and penetration of water into porous nonwovens can be adjusted with low-temperature deposited metal oxide. In addition, adhesion of extrusion coated biopolymer to inorganic oxides can be improved with a hybrid layer based on lactic acid. [Copyright &y& Elsevier]

Details

Language :
English
ISSN :
00224596
Volume :
214
Database :
Academic Search Index
Journal :
Journal of Solid State Chemistry
Publication Type :
Academic Journal
Accession number :
95987497
Full Text :
https://doi.org/10.1016/j.jssc.2013.11.040