Cite
Atomic and molecular layer deposition for surface modification.
MLA
Vähä-Nissi, Mika, et al. “Atomic and Molecular Layer Deposition for Surface Modification.” Journal of Solid State Chemistry, vol. 214, June 2014, pp. 7–11. EBSCOhost, https://doi.org/10.1016/j.jssc.2013.11.040.
APA
Vähä-Nissi, M., Sievänen, J., Salo, E., Heikkilä, P., Kenttä, E., Johansson, L.-S., Koskinen, J. T., & Harlin, A. (2014). Atomic and molecular layer deposition for surface modification. Journal of Solid State Chemistry, 214, 7–11. https://doi.org/10.1016/j.jssc.2013.11.040
Chicago
Vähä-Nissi, Mika, Jenni Sievänen, Erkki Salo, Pirjo Heikkilä, Eija Kenttä, Leena-Sisko Johansson, Jorma T. Koskinen, and Ali Harlin. 2014. “Atomic and Molecular Layer Deposition for Surface Modification.” Journal of Solid State Chemistry 214 (June): 7–11. doi:10.1016/j.jssc.2013.11.040.