Direct evidence of porosity in carbon-rich hydrogenated amorphous silicon carbide films.

Studies the oxidation of hydrogenated amorphous silicon carbide films prepared by glow-discharge decomposition of gaseous mixtures of silane and methane by using infrared absorption spectroscopy. Infrared differential absorbance spectrum of a carbon-rich sample obtained after six month room-temperature exposure to air; Overview of differential absorption spectra resulting from the oxidation of a sample; Presence of a large fraction of CH[sub3] precursor radical.