Direct evidence of porosity in carbon-rich hydrogenated amorphous silicon carbide films.

MLA

Arce, R., et al. “Direct Evidence of Porosity in Carbon-Rich Hydrogenated Amorphous Silicon Carbide Films.” Journal of Applied Physics, vol. 66, no. 9, Nov. 1989, p. 4544. EBSCOhost, https://doi.org/10.1063/1.343926.

APA

Arce, R., Koropecki, R. R., Buitrago, R. H., Alvarez, F., & Chambouleyron, I. (1989). Direct evidence of porosity in carbon-rich hydrogenated amorphous silicon carbide films. Journal of Applied Physics, 66(9), 4544. https://doi.org/10.1063/1.343926

Chicago

Arce, R., R. R. Koropecki, R. H. Buitrago, F. Alvarez, and I. Chambouleyron. 1989. “Direct Evidence of Porosity in Carbon-Rich Hydrogenated Amorphous Silicon Carbide Films.” Journal of Applied Physics 66 (9): 4544. doi:10.1063/1.343926.