Liquid junctions for characterization of electronic materials. III. Modulation spectroscopies of reactive ion etching of Si.

Investigates photoreflectance, electrolyte photoreflectance (PR) and electrolyte electroreflectance (EER) for various reactive ion etching treatments of n-silicon. Use of modulation spectroscopy; Dependence of the amplitude of the EER transition on the electrode potential for untreated silicon; Low-field limit of EER and PR.