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Microwave PtSi-Si schottky-barrier-detector diode fabrication using an implanted active layer on...
- Source :
-
IEEE Transactions on Microwave Theory & Techniques . May98 Part 2 of 2, Vol. 46 Issue 5, p641. 6p. 3 Black and White Photographs, 8 Diagrams, 2 Charts, 4 Graphs. - Publication Year :
- 1998
-
Abstract
- Examines the development of a surface-oriented planar Schottky diode for use as a detector diode on silicon monolithic microwave integrated circuits (MIMIC). Information on the formation on the PtSi-Si barrier; Description of the process technology which was developed for the Schottky-detector diode fabrication; Identification of the typical measured cutoff frequency.
- Subjects :
- *SCHOTTKY barrier diodes
Subjects
Details
- Language :
- English
- ISSN :
- 00189480
- Volume :
- 46
- Issue :
- 5
- Database :
- Academic Search Index
- Journal :
- IEEE Transactions on Microwave Theory & Techniques
- Publication Type :
- Academic Journal
- Accession number :
- 607764
- Full Text :
- https://doi.org/10.1109/22.668676