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Substitutional carbon reduction in SiGeC alloys grown by rapid thermal chemical vapor deposition.
- Source :
-
Applied Physics Letters . 10/11/1999, Vol. 75 Issue 15, p2271. 3p. 5 Graphs. - Publication Year :
- 1999
-
Abstract
- Studies the substitutional carbon reduction in SiGeC alloys grown by rapid thermal chemical vapor deposition. Increases in the compressive strain in the originally strain-compensated alloys; Maximum amount of carbon reduction; Enhancement of the reduction of substitutional carbon.
- Subjects :
- *CHEMICAL reduction
*CARBON
*CHEMICAL vapor deposition
*ALLOYS
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 75
- Issue :
- 15
- Database :
- Academic Search Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 4190636
- Full Text :
- https://doi.org/10.1063/1.124987