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Substitutional carbon reduction in SiGeC alloys grown by rapid thermal chemical vapor deposition.

Authors :
Liu, C.W.
Tseng, Y.D.
Source :
Applied Physics Letters. 10/11/1999, Vol. 75 Issue 15, p2271. 3p. 5 Graphs.
Publication Year :
1999

Abstract

Studies the substitutional carbon reduction in SiGeC alloys grown by rapid thermal chemical vapor deposition. Increases in the compressive strain in the originally strain-compensated alloys; Maximum amount of carbon reduction; Enhancement of the reduction of substitutional carbon.

Subjects

Subjects :
*CHEMICAL reduction
*CARBON
*CHEMICAL vapor deposition
*ALLOYS

Details

Language :
English
ISSN :
00036951
Volume :
75
Issue :
15
Database :
Academic Search Index
Journal :
Applied Physics Letters
Publication Type :
Academic Journal
Accession number :
4190636
Full Text :
https://doi.org/10.1063/1.124987
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