Cite
Substitutional carbon reduction in SiGeC alloys grown by rapid thermal chemical vapor deposition.
MLA
Liu, C. W., and Y. D. Tseng. “Substitutional Carbon Reduction in SiGeC Alloys Grown by Rapid Thermal Chemical Vapor Deposition.” Applied Physics Letters, vol. 75, no. 15, Oct. 1999, p. 2271. EBSCOhost, https://doi.org/10.1063/1.124987.
APA
Liu, C. W., & Tseng, Y. D. (1999). Substitutional carbon reduction in SiGeC alloys grown by rapid thermal chemical vapor deposition. Applied Physics Letters, 75(15), 2271. https://doi.org/10.1063/1.124987
Chicago
Liu, C.W., and Y.D. Tseng. 1999. “Substitutional Carbon Reduction in SiGeC Alloys Grown by Rapid Thermal Chemical Vapor Deposition.” Applied Physics Letters 75 (15): 2271. doi:10.1063/1.124987.