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The Si (001) substrate with sub-nano streaky surface: Preparation and its application to high-quality growth of GaAs heteroepitaxial-layer.

Authors :
Zhang, Yidong
Li, Jian
Ren, Xiaomin
Wang, Qi
Liu, Hao
Jiang, Chen
Li, Chuanchuan
Wei, Xin
Source :
Applied Surface Science. Jan2024, Vol. 643, pN.PAG-N.PAG. 1p.
Publication Year :
2024

Abstract

[Display omitted] • The Si (001) substrates with a kind of special sub-nano streaky surface are etched at atomic resolution. • The sub-nano streaky surface is prepared by utilizing a special pattern of H 2 SO 4 residue and then etching with HF. • The Si (001) substrates with sub-nano streaky surface are proved to be very advantageous for III/V growth. • The generation of antiphase-boundaries at the very beginning of the GaAs growth is completely prevented. • This substrate can enhance the overall crystalline quality, for example, achieving low threading dislocation density. The Si (001) substrates with a kind of special sub-nano streaky surface were prepared and applied to high-quality growth of GaAs heteroepitaxial-layers. The morphology of each of them features a series of parallel but randomly intermittent streaks along a common fixed direction and individually with their own saw-tooth cross-sections. The lateral interval between any two adjacent streaks is bound to be in sub-nano scale and both the two side-facets of every cross-section sawtooth are {111} planes. It has been found that the direct growth of GaAs epilayers on this kind of substrates, especially on exactly (001) oriented ones, can not only completely prevent the antiphase boundaries (APBs) generation, but also significantly reduce the threading dislocation density (TDD). This advancement could be regarded as a nearly perfect solution to APBs elimination and, moreover, provides better basis for further TDD reduction in the preparation of III-V/Si epilayers and for relevant device fabrications. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
01694332
Volume :
643
Database :
Academic Search Index
Journal :
Applied Surface Science
Publication Type :
Academic Journal
Accession number :
173472879
Full Text :
https://doi.org/10.1016/j.apsusc.2023.158685