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Limitations of optical lithography on non-planar surfaces.

Authors :
Zawadzka, Agnieszka
Paszkiewicz, Regina
Source :
Materials Science in Semiconductor Processing. Jun2022, Vol. 143, pN.PAG-N.PAG. 1p.
Publication Year :
2022

Subjects

Subjects :
*PHOTOLITHOGRAPHY
*PHENOMENOLOGICAL theory (Physics)
*ELECTRIC fields
*LITHOGRAPHY

Details

Language :
English
ISSN :
13698001
Volume :
143
Database :
Academic Search Index
Journal :
Materials Science in Semiconductor Processing
Publication Type :
Academic Journal
Accession number :
155662114
Full Text :
https://doi.org/10.1016/j.mssp.2022.106548
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