Limitations of optical lithography on non-planar surfaces.

MLA

Zawadzka, Agnieszka, and Regina Paszkiewicz. “Limitations of Optical Lithography on Non-Planar Surfaces.” Materials Science in Semiconductor Processing, vol. 143, June 2022, p. N.PAG. EBSCOhost, https://doi.org/10.1016/j.mssp.2022.106548.

APA

Zawadzka, A., & Paszkiewicz, R. (2022). Limitations of optical lithography on non-planar surfaces. Materials Science in Semiconductor Processing, 143, N.PAG. https://doi.org/10.1016/j.mssp.2022.106548

Chicago

Zawadzka, Agnieszka, and Regina Paszkiewicz. 2022. “Limitations of Optical Lithography on Non-Planar Surfaces.” Materials Science in Semiconductor Processing 143 (June): N.PAG. doi:10.1016/j.mssp.2022.106548.