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Your search keyword '"step&repeat"' showing total 3 results
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3 results on '"step&repeat"'

2. Membranes and tubules by nanoimprinting and atomic layer deposition

Subjects
ALD, SSIL, nanoimprinting, step and stamp, step&repeat, NIL
Abstract

The residual layer inherent for nanoimprinting is usually taken to be a problem in the process. We exploit the residual layer in fabrication of the complex free-standing membranes by growing a layer of Al2O3 or Al2O3/TiO2 lamellae by ALD directly on top of the nanoimprinted polymer film, following by removal of the sacrificial polymer layer.

Published
2013

3. Membranes and tubules by nanoimprinting and atomic layer deposition

Author

Tomi Haatainen, Markku Kainlauri, Sanna Arpiainen, Merja Markkanen, Jaana Marles, Riikka Puurunen, and Jouni Ahopelto

Subjects
ALD, SSIL, nanoimprinting, step and stamp, step&repeat, NIL
Abstract

The residual layer inherent for nanoimprinting is usually taken to be a problem in the process. We exploit the residual layer in fabrication of the complex free-standing membranes by growing a layer of Al2O3 or Al2O3/TiO2 lamellae by ALD directly on top of the nanoimprinted polymer film, following by removal of the sacrificial polymer layer.

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