Membranes and tubules by nanoimprinting and atomic layer deposition

The residual layer inherent for nanoimprinting is usually taken to be a problem in the process. We exploit the residual layer in fabrication of the complex free-standing membranes by growing a layer of Al2O3 or Al2O3/TiO2 lamellae by ALD directly on top of the nanoimprinted polymer film, following by removal of the sacrificial polymer layer.