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Multi-charged ion source which has wide operating conditions is required in various application fields. We have constructed tandem type ECR ion source (ECRIS); one of the features of its main stage is an additional coil for controlling magnetic field distribution around the mirror bottom precisely. Here the effect of magnetic field variation caused by the additional coil is experimentally considered in terms of plasma parameters and beam current as the first investigation of the main stage plasma. Furthermore, behavior of magnetic lines of force flowing from the ECR zone is calculated, and is compared with measurement results aiming for better understanding of interrelationship between plasma production and ion beam generation on the ECRIS.

We are constructing a tandem type electron cyclotron resonance (ECR) ion source (ECRIS). High-energy electrons in ECRIS plasma affect electron energy distribution and generate multicharged ion. In this study, we measure electron energy distribution function (EEDF) of low energy region (≦100 eV) in ECRIS plasma at extremely low pressures (10(-3)-10(-5) Pa) by using cylindrical Langmuir probe. From the result, it is found that the EEDF correlates with the electron density and the temperature from the conventional probe analysis. In addition, we confirm that the tail of EEDF spreads to high energy region as the pressure rises and that there are electrons with high energy in ECR multicharged ion source plasma. The effective temperature estimated from the experimentally obtained EEDF is larger than the electron temperature obtained from the conventional method.

We are constructing a tandem-type electron cyclotron resonance ion source (ECRIS). The first stage of this can supply 2.45 GHz and 11-13 GHz microwaves to plasma chamber individually and simultaneously. We optimize the beam current I(FC) by the mobile plate tuner. The I(FC) is affected by the position of the mobile plate tuner in the chamber as like a circular cavity resonator. We aim to clarify the relation between the I(FC) and the ion saturation current in the ECRIS against the position of the mobile plate tuner. We obtained the result that the variation of the plasma density contributes largely to the variation of the I(FC) when we change the position of the mobile plate tuner.

An electron cyclotron resonance ion source (ECRIS) is used to generate multicharged ions for many kinds of the fields. We have developed an evaporator by using induction heating method that can generate pure vapor from solid state materials in ECRIS. We develop the new matching and protecting circuit by which we can precisely control the temperature of the induction heating evaporator. We can control the temperature within ±15 °C around 1400 °C under the operation pressure about 10(-4) Pa. We are able to use this evaporator for experiment of synthesizing process to need pure vapor under enough low pressure, e.g., experiment of generation of endohedral Fe-fullerene at the ECRIS.

In order to contribute to various applications of plasma and beams based on an electron cyclotron resonance, a new concept on magnetic field with all magnets on plasma production and confinement has been proposed with enhanced efficiency for broad and dense ion beam. The magnetic field configuration consists of a pair of comb-shaped magnet surrounding plasma chamber cylindrically. Resonance zones corresponding for 2.45 GHz and 11–13 GHz frequencies are positioned at spatially different positions. We launch simultaneously multiplex frequencies microwaves operated individually, try to control profiles of the plasma parameters and the extracted ion beams, and to measure them in detail.

In order to enhance the efficiency of an electron cyclotron resonance (ECR) plasma for a broad and dense ion beam source at low pressure, the magnetic field configuration is constructed by all permanent magnets. By using the pulse mode, we aim at the generation of plasma with parameters that cannot be achieved in the CW mode at microwave frequencies of 11-13GHz, under the constraint of the same average incident microwave powers. It is found that the total beam currents are increased by the pulse mode operation compared with the case of the CW mode. According to probe measurements of the ECR plasma, it is found that the electron density in the pulse mode is larger than that in the CW mode, while the electron temperatures in the pulse mode are lower than that in the CW mode. These results are discussed from the viewpoint of relaxation times obtained on plasma parameters and ECR efficiency. The cause of the beam current increment and operational windows spread due to the pulse mode are also discussed on these parameters suitable to production of molecular/cluster ions.

Multiply charged ions to be used prospectively are produced from solid pure material in an electron cyclotron resonance ion source (ECRIS). Recently a pure iron source is also required for the production of caged iron ions in the fullerene in order to control cells in vivo in bio-nano science and technology. We adopt directly heating iron rod by induction heating (IH) because it has non-contact with insulated materials which are impurity gas sources. We choose molybdenum wire for the IH coils because it doesn’t need water cooling. To improve power efficiency and temperature control, we propose to the new circuit without previously using the serial and parallel dummy coils (SPD) for matching and safety. We made the circuit consisted of inductively coupled coils which are thin-flat and helix shape, and which insulates the IH power source from the evaporator. This coupling coils circuit, i.e. insulated induction heating coil transformer (IHCT), can be move mechanically. The secondary current can be adjusted ...

We are constructing a tandem type electron cyclotron resonance (ECR) ion source (ECRIS). The first stage of this ECRIS has a large-bore with cylindrically comb-shaped permanent magnets. 2.45GHz and 11-13GHz microwaves can be supplied individually and simultaneously to the plasma chamber. For 2.45GHz, a coaxial semi-dipole antenna is used to feed the microwaves. In previous experiments, there were two problems encountered when running the 2.45GHz microwaves. High incident power was necessary to keep ECR discharge at low operating pressure because of high reflected microwave power. The surface of a support insulator between the inner and the outer electrodes of coaxial semi-dipole antenna was easily metalized by sputtering of the metal wall inside the chamber. The purpose of this study was to solve these problems. Performing several simulation experiments supports the hypothesis that the position of the support insulator is significant for microwave power efficiency. The end result was the ability to sustain ECR discharges at extremely low incident microwave power, several tens of watts, by optimized matching of the position and shape of the insulator.

A new tandem type source has been constructed on the basis of electron cyclotron resonance (ECR) plasma for producing synthesized ion beams. We investigate feasibility and hope to realize the device which has wide range operation window in a single device to produce many kinds of ion beams based on ECR ion source (ECRIS). It is considered that ECR plasmas are necessary to be available to individual operations with different plasma parameters. Both of analysis of ion beams and investigation of plasma parameters are conducted on produced plasmas. We describe construction of the new tandem type ion source based on ECRIS with wide operation window for aiming at producing synthesized ion beams as this new source can be a universal source.

We are constructing a tandem type ECRIS. The first stage is large-bore with cylindrically comb-shaped magnet. We optimize the ion beam current and ion saturation current by a mobile plate tuner. They change by the position of the plate tuner for 2.45 GHz, 11-13 GHz, and multi-frequencies. The peak positions of them are close to the position where the microwave mode forms standing wave between the plate tuner and the extractor. The absorbed powers are estimated for each mode. We show a new guiding principle, which the number of efficient microwave mode should be selected to fit to that of multipole of the comb-shaped magnets. We obtained the excitation of the selective modes using new mobile plate tuner to enhance ECR efficiency.