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The challenge to bring together flexibility, accuracy, high resolution and a short measurement time lead to the invention of the tilted wave interferometry, a metrology approach for asphere and freeform surfaces.

We present our first results of a stray light optimized and compact interferometer zoom lens with a large range of measureable sphere radii and the option to compensate astigmatism, based on an idea of Lohmann.

Using an open source tool based on nVidias OptiX engine, the applicability of GPU-accelerated ray tracing to optical simulation is investigated for a variety of applications including coherent ray tracing and nonsequential stray light analysis.

Microoptical components play an increasing role in different technology fields such as medical engineering, materials and information processing, imaging and metrology. But their realization needs the combination of modern design concepts with sophisticated processing technologies, new materials and design tools. Furthermore, the introduction of ambitious processing technologies must be accompanied by effective metrology and inspection tools. Therefore, this paper reports about the technologies for making microoptics at ITO. Because sophisticated measurement tools are an indispensable part of the fabrication process, the paper describes our multi-scale inspection approach for the testing of microstructures on wafer-scale level. Finally, some representative applications of microoptical components for advanced measurement and imaging are explained.