Flexibility and Rapid Measurement: Asphere and Freeform Metrology with Tilted Wave Interferometry

Authors :: Christof Pruss
Woflgang Osten
Johannes Schindler
Goran Baer
Source :: Classical Optics 2014.
Publication Year :: 2014
Publisher :: OSA, 2014.
Abstract: The challenge to bring together flexibility, accuracy, high resolution and a short measurement time lead to the invention of the tilted wave interferometry, a metrology approach for asphere and freeform surfaces.

Subjects :: Flexibility (engineering)
Interferometry
Materials science
Optics
business.industry
Astrophysics::Instrumentation and Methods for Astrophysics
Calibration
High resolution
business
Laser beams
Metrology

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