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Your search keyword '"Wanzenboeck, Heinz D."' showing total 117 results
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117 results on '"Wanzenboeck, Heinz D."'

1. Analysis of carbon content in direct-write plasmonic Au structures by nanomechanical scanning absorption microscopy

Author

Chien, Miao-Hsuan, Shawrav, Mostafa M., Hingerl, Kurt, Taus, Philipp, Schinnerl, Markus, Wanzenboeck, Heinz D., and Schmid, Silvan

Subjects
Physics - Optics, Physics - Instrumentation and Detectors
Abstract

The determination of the chemical content is crucial for the quality control in high-precision device fabrication and advanced process development. For reliable chemical composition characterization, certain interaction volume of the target material is necessary for conventional techniques such as energy-dispersive X-ray spectroscopy (EDX) and electron energy loss spectroscopy (EELS). This remains however a challenge for nanostructures. We hereby propose an alternative technique for measuring chemical composition of nanostructures with limited volume. By measuring the differences in the optical absorption of the nanostructure due to the differences in the chemical composition with the resonance frequency detuning of a nanomechanical resonator as well as the assistance of the analytical optical modelling, we demonstrate the possibility of characterizing the carbon content in the direct-write focused electron beam induced deposition (FEBID) gold nanostructures., Comment: 14 pages, 3 figures

Published
2020
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5. Nanoimprinted Hierarchical Micro-/Nanostructured Substrates for the Growth of Cardiomyocyte Fibers

Author

Mühlberger, Michael M., primary, Kopp, Sonja, additional, Deyett, Alision A., additional, Pribyl, Markus, additional, Haslinger, Michael J., additional, Siegel, Anica M., additional, Taus, Philipp, additional, Guillén, Elena, additional, Torres-Caballero, Aranxa, additional, Baltov, Bozhidar, additional, Netzer, Michael A., additional, Prado-López, Sonia, additional, Yde, Leif, additional, Stensborg, Jan, additional, Mendjan, Sasha, additional, Hering, Steffen, additional, and Wanzenboeck, Heinz D., additional

Published
2023
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9. Analysis of carbon content in direct-write plasmonic Au structures by nanomechanical scanning absorption microscopy.

Author

Chien, Miao-Hsuan, Shawrav, Mostafa M., Hingerl, Kurt, Taus, Philipp, Schinnerl, Markus, Wanzenboeck, Heinz D., and Schmid, Silvan

Subjects
CARBON analysis, GOLD nanoparticles, CONTENT analysis, MICROSCOPY, ANALYTICAL chemistry, LIGHT absorption
Abstract

In this work, a novel chemical composition characterization method of direct-write focused electron beam-induced deposition (FEBID) gold nanostructures is presented. The reliable determination of the chemical content for nanostructures has been challenging due to its limited interaction volume. We hereby propose an alternative technique for measuring the chemical composition of nanostructures with limited volume. By measuring the differences in the optical absorption of the nanostructure due to the differences in the chemical composition with the resonance frequency detuning of a nanomechanical resonator and the assistance of analytical optical modeling, we demonstrate the possibility of characterizing the carbon content in the (FEBID) gold nanostructures. From our characterization method, the post-purification process with water successfully reduced the carbon content from ∼65 at. % to ∼20 at. %. This method presents a new technique for the chemical analysis of nanostructures. [ABSTRACT FROM AUTHOR]

Published
2021
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10. Development of a multi-sensor integrated midbrain organoid-on-a-chip platform for studying Parkinson’s disease

Author

Spitz, Sarah, primary, Bolognin, Silvia, additional, Brandauer, Konstanze, additional, Füßl, Julia, additional, Schuller, Patrick, additional, Schobesberger, Silvia, additional, Jordan, Christian, additional, Schädl, Barbara, additional, Grillari, Johannes, additional, Wanzenboeck, Heinz D., additional, Mayr, Torsten, additional, Harasek, Michael, additional, Schwamborn, Jens C., additional, and Ertl, Peter, additional

Published
2022
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23. Mask-free prototyping of metal-oxide-semiconductor devices utilizing focused electron beam induced deposition

Author

Shawrav, Mostafa Moonir, Wanzenboeck, Heinz D., Belic, Domagoj, Gavagnin, Marco, Bethge, Ole, Schinnerl, Markus, and Bertagnolli, Emmerich

Subjects
atomic layer deposition, capacitance–voltage characteristics, focused electron beam induced deposition, gold, MOS capacitors
Abstract

Focused electron beam induced deposition (FEBID) is a novel direct‐writing technique to produce noble metal nanostructures. In this work, FEBID has been employed for the first time to fabricate metal‐oxide‐semiconductor capacitors (MOSCAPs). Experimental parameters such as precursor temperature, substrate temperature and the (de)focus of the electron beam have been optimized to deposit electrode structures of a relatively large area within a short timeframe. Using FEBID, gold electrodes have been deposited on top of an atomic layer deposited (ALD) dielectric aluminum oxide layer. Chemical composition of the produced structures has been studied using energy dispersive X‐ray spectroscopy (EDX). Current–voltage (I–V) measurements have confirmed the conductivity of FEBID gold nanowires (NWs). Measured capacitance–voltage (C–V) characteristics of FEBID‐fabricated MOSCAP prototypes resemble the typical C–V characteristics of conventionally fabricated MOSCAPs, thus confirming the functionality of our FEBID devices.

Published
2013
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24. Magnetic force microscopy study of shape engineered FEBID iron nanostructures

Author

Gavagnin, Marco, Wanzenboeck, Heinz D., Belic, Domagoj, Shawrav, Mostafa M., Persson, Anders, Gunnarsson, Klas, Svedlindh, Peter, and Bertagnolli, Emmerich

Subjects
focused electron beam induced deposition, iron pentacarbonyl, magnetic nanostructures, MFM
Abstract

The capability to control matter down to the nanoscale level in combination with the novel magnetic properties of nanomaterials have attracted increasing attention in the last few decades due to their applications in magnetic sensing, hard disc data storage and logic devices. Therefore, many efforts have been devoted to the implementation of both nanofabrication methods as well as characterization of magnetic nanoelements. In this study, Fe‐based nanostructures have been synthesized on Si(100) by focused electron beam induced deposition (FEBID) utilizing iron pentacarbonyl as precursor. The so obtained nanostructures exhibit a remarkably high iron content (Fe > 80 at.%), expected to give rise to a ferromagnetic behaviour. For that reason, magnetic force microscopy (MFM) analyses were performed on the obtained FEBID Fe nanostructures. Moreover, object oriented micromagnetic framework (OOMMF) magnetic simulations have been executed to study the influence of the geometry on the magnetic properties of iron single‐domain nanowires.

Published
2013
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25. Focused Ion Beam Lithography

Author

Wanzenboeck, Heinz D.

Subjects
Science / Physics / Condensed Matter
Abstract

Focused Ion Beam Lithography

Published
2011

28. Magnetic force microscopy study of shape engineered FEBID iron nanostructures

Author

Gavagnin, Marco, Wanzenboeck, Heinz D, Belic, Domagoj, Shawrav, Mostafa M, Persson, Anders, Gunnarsson, Klas, Svedlindh, Peter, Bertagnolli, Emmerich, Gavagnin, Marco, Wanzenboeck, Heinz D, Belic, Domagoj, Shawrav, Mostafa M, Persson, Anders, Gunnarsson, Klas, Svedlindh, Peter, and Bertagnolli, Emmerich

Abstract

The capability to control matter down to the nanoscale level in combination with the novel magnetic properties of nanomaterials have attracted increasing attention in the last few decades due to their applications in magnetic sensing, hard disc data storage and logic devices. Therefore, many efforts have been devoted to the implementation of both nanofabrication methods as well as characterization of magnetic nanoelements. In this study, Fe-based nanostructures have been synthesized on Si(100) by focused electron beam induced deposition (FEBID) utilizing iron pentacarbonyl as precursor. The so obtained nanostructures exhibit a remarkably high iron content (Fe>80at.%), expected to give rise to a ferromagnetic behaviour. For that reason, magnetic force microscopy (MFM) analyses were performed on the obtained FEBID Fe nanostructures. Moreover, object oriented micromagnetic framework (OOMMF) magnetic simulations have been executed to study the influence of the geometry on the magnetic properties of iron single-domain nanowires. FEBID is a mask-less nanofabrication method based on the injection of precursor gas molecules in proximity of the deposition area where their decomposition is locally induced by a focused electron beam.

Published
2014
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29. Free-Standing Magnetic Nanopillars for 3D Nanomagnet Logic

Author

Gavagnin, Marco, Wanzenboeck, Heinz D., Wachter, Stefan, Shawrav, Mostafa M., Persson, Anders, Gunnarsson, Klas, Svedlindh, Peter, Stoeger-Pollach, Michael, Bertagnolli, Emmerich, Gavagnin, Marco, Wanzenboeck, Heinz D., Wachter, Stefan, Shawrav, Mostafa M., Persson, Anders, Gunnarsson, Klas, Svedlindh, Peter, Stoeger-Pollach, Michael, and Bertagnolli, Emmerich

Abstract

Nanomagnet logic (NML) is a relatively new computation technology that uses arrays of shape-controlled nanomagnets to enable digital processing. Currently, conventional resist-based lithographic processes limit the design of NML circuitry to planar nanostructures with homogeneous thicknesses. Here, we demonstrate the focused electron beam induced deposition of Fe-based nanomaterial for magnetic in-plane nanowires and out-of-plane nanopillars. Three-dimensional (3D) NML was achieved based on the magnetic coupling between nanowires and nanopillars in a 3D array. Additionally, the same Fe-based nanomaterial was used to produce tilt-corrected high-aspect-ratio probes for the accurate magnetic force microscopy (MFM) analysis of the fabricated 3D NML gate arrays. The interpretation of the MFM measurements was supported by magnetic simulations using the Object Oriented MicroMagnetic Framework. Introducing vertical out-of-plane nanopillars not only increases the packing density of 3D NML but also introduces an extra magnetic degree of freedom, offering a new approach to input/output and processing functionalities in nanomagnetic computing.

Published
2014
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30. Free-Standing Magnetic Nanopillars for 3D Nanomagnet Logic

Author

Gavagnin, Marco, primary, Wanzenboeck, Heinz D., additional, Wachter, Stefan, additional, Shawrav, Mostafa M., additional, Persson, Anders, additional, Gunnarsson, Klas, additional, Svedlindh, Peter, additional, Stöger-Pollach, Michael, additional, and Bertagnolli, Emmerich, additional

Published
2014
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49. Mask-free prototyping of metal-oxide-semiconductor devices utilizing focused electron beam induced deposition.

Author

Shawrav, Mostafa Moonir, Wanzenboeck, Heinz D., Belic, Domagoj, Gavagnin, Marco, Bethge, Ole, Schinnerl, Markus, and Bertagnolli, Emmerich

Subjects
*METAL oxide semiconductors, *ELECTRON beams, *ELECTRON beam induced current, *NANOSTRUCTURES, *ELECTRODES, *ATOMIC layer deposition, *X-ray spectroscopy
Abstract

Focused electron beam induced deposition (FEBID) is a novel direct-writing technique to produce noble metal nanostructures. In this work, FEBID has been employed for the first time to fabricate metal-oxide-semiconductor capacitors (MOSCAPs). Experimental parameters such as precursor temperature, substrate temperature and the (de)focus of the electron beam have been optimized to deposit electrode structures of a relatively large area within a short timeframe. Using FEBID, gold electrodes have been deposited on top of an atomic layer deposited (ALD) dielectric aluminum oxide layer. Chemical composition of the produced structures has been studied using energy dispersive X-ray spectroscopy (EDX). Current-voltage ( I- V) measurements have confirmed the conductivity of FEBID gold nanowires (NWs). Measured capacitance-voltage ( C- V) characteristics of FEBID-fabricated MOSCAP prototypes resemble the typical C- V characteristics of conventionally fabricated MOSCAPs, thus confirming the functionality of our FEBID devices. Illustration of a MOS capacitor fabricated by FEBID. [ABSTRACT FROM AUTHOR]

Published
2014
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50. Modeling of precursor coverage in ion-beam induced etching and verification with experiments using XeF2 on SiO2.

Author

Ebm, Christoph, Hobler, Gerhard, Waid, Simon, and Wanzenboeck, Heinz D.

Subjects
ION bombardment, GALLIUM, PLASMA etching, ADSORPTION (Chemistry), CHEMICAL decomposition, DIFFUSION, DENSITY currents
Abstract

Focused ion beams are an established but inherently slow technique for many nanopatterning applications. One way to increase its processing speed is by gas-assisted ion-beam induced etching. However, to understand and improve this process, the ability to accurately simulate the precursor coverage is very important, because it strongly affects the efficiency of the process. In this paper, the authors present a recoils-based simulation model that considers precursor adsorption, decomposition, and diffusion. The authors provide a non-steady-state solution for translational symmetry, which they use to investigate the influence of the precursor diffusion coefficient on the etching process. They find that the diffusion coefficient influences the shape of the bottom of the irradiated structure. Furthermore, they compare the simulation results to experiments of SiO2 etched by XeF2 using a focused Ga ion beam, and extract model parameters such that the etching rate of numerous experiments with different current densities can be predicted accurately. [ABSTRACT FROM AUTHOR]

Published
2010
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